Highly Sensitive One Chip Eight Channel Sensing of Ultra-Compact Parallel Integrated Photonic Crystal Cavities Based on Silicon-on-insulator Platform

Lin Zhang,Zhongyuan Fu,Fujun Sun,Chao Wang,Huiping Tian
DOI: https://doi.org/10.1109/cleopr.2017.8118882
2017-01-01
Abstract:We design highly sensitive one chip multichannel sensor array by using a 1×8 power splitter, eight one dimensional photonic crystal slot nanobeam cavities connected by additional bandgap filters, and an 8×1 coupler. The structure is lying on top of a 2 μm buried SiOi layer, while remaining high sensitivities (over 400 nm/RIU) of all sensors.
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