Phonon and Electron Contributions to the Thermal Conductivity of VNx Epitaxial Layers

Qiye Zheng,Antonio B. Mei,Mohit Tuteja,Davide G. Sangiovanni,Lars Hultman,Ivan Petrov,J. E. Greene,David G. Cahill
DOI: https://doi.org/10.1103/physrevmaterials.1.065002
IF: 3.98
2017-01-01
Physical Review Materials
Abstract:Thermal conductivities of VNx/MgO(001) (0.76 <= x <= 1.00) epitaxial layers, grown by reactive magnetron sputter deposition, are measured in the temperature range 300 < T < 1000 K using time-domain thermore-flectance (TDTR). Data for the total thermal conductivity are compared to the electronic contribution to the thermal conductivity calculated from the measured electrical conductivity, the Wiedemann-Franz law, and an estimate of the temperature dependence of the Lorenz number L(T). The total thermal conductivity is dominated by electron contribution and varies between 13 W m(-1) K-1 at x = 0.76 and 20 W m(-1) K-1 at x = 1.00 for T = 300 K and between 25 and 35 W m(-1) K-1 for T = 1000 K. The lattice thermal conductivity vs x ranges from 5 to 7 W m(-1) K-1 at 300 K and decreases by 20% at 500 K. The low magnitude and weak temperature dependence of the lattice thermal conductivity are attributed to strong electron-phonon coupling in VN.
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