Abstract:This paper describes the implementation of an autofocus function for a laser beam in a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices. This implementation can compensate for defocus caused during continuous measurements that take dozens of hours. After a brief explanation of the system used in this work, a detailed discussion is given on the employed evaluation function indicating focus status, which is a key factor determining autofocus reliability. It is shown that the sum of the energies of Laplacians is suitable as an evaluation function, which can be calculated by an image of the probing laser spot captured by a built-in CCD camera. Then, the implementation of the autofocus function in the current system is detailed. It is confirmed that this function can adjust the focus within almost ±20μm defocus conditions. Finally, it is confirmed how the implemented autofocus function works effectively to keep just-in-focus under disturbance.

Implementation of Frequency Scanning Function in Phase Sensitive Laser Probe System for RF SAW/BAW Devices

Phase-Sensitive And Fast-Scanning Laser Probe System For Rf Saw/Baw Devices

Integrated Software for Image Processing in RF SAW/BAW Laser Probe System

Implementation of Auto-focus Function to Laser Probe for RF Acoustic Wave Devices for Its Long Time Continuous Operation

Phase-sensitive and fast-scanning laser probe system for radio frequency surface/bulk acoustic wave devices

Laser Probe System for 5 GHz SAW/BAW Devices

Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range

Development of Fast-Scanning Laser Probe System Based on Knife-Edge Method for Diagnosis of Rf Surface Acoustic Wave Devices

Phase-Sensitive And Fast-Scanning Laser Probe System For Diagnosis Of High Frequency Acoustic Wave Devices

A Laser Probe Based on a Sagnac Interferometer with Fast Mechanical Scan for RF Surface and Bulk Acoustic Wave Devices

Integrated Software for Image Processing in Radio Frequency Surface and Bulk Acoustic Wave Laser Probe System

High-Speed Laser Probing System for Surface Acoustic Wave Devices Based on Knife-Edge Method

Focus adjustment system for a fast-scanning and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

Study on the Frequency Dependence of Lateral Energy Leakage in Rf Baw Device by Fast-Scanning Laser Probe System

Time-delay Compensation in Detection Electronics of Fast Scanning 2D SAW/BAW Laser Probe

Development of a High-Speed, Phase-Sensitive Laser Probe System for RF Surface/bulk Acoustic Wave Devices with an Autofocus Function for Long-Time Continuous Operation

A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System

A Multiple-Scan Focusing Method for Radio Frequency Bulk Acoustic Wave Device Observation by Laser Probe System

Focus Adjustment System of Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices

High Resolution Laser-Interferometric Probing of SAW Devices

Wavenumber Domain Analysis of Two-Dimensional SAW Images Captured by Phase-Sensitive Laser Probe System