A Review of On-Chip Micro Supercapacitors for Integrated Self-Powering Systems

Caiwei Shen,Sixing Xu,Yingxi Xie,Mohan Sanghadasa,Xiaohong Wang,Liwei Lin
DOI: https://doi.org/10.1109/JMEMS.2017.2723018
IF: 2.829
2017-01-01
Journal of Microelectromechanical Systems
Abstract:Miniaturized self-powering systems that integrate both energy harvesters and energy storage units as the power sources are essential to realize maintenance-free wireless sensor networks, implantable medical devices, and active radio frequency identification systems. On-chip micro supercapacitors (MSCs) are promising candidates for energy storage in such systems by providing high power densities, f...
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