Abstract:environments. As a result, we are developing chemical sensors within integrated microfluidic systems for sensitive and selective detection of these pollutants. Our approach is to combine established chemical sensing strategies with microfluidic structures, especially in plastic devices, to achieve a total heavy metal analysis system. In this regard, the combination of three complementary techniques-optical waveguide spectroscopy, electrochemistry and chemical partitioning offers the required selectivity and sensitivity essential for many environmental samples. On-chip optical waveguide spectroscopy promises to yield the necessary high sensitivity but relies on fabrication of optical structures with a material of appropriate refractive index, optical quality, and chemical stability by methods consistent with established fabrication methods. SU-8, the epoxy-based negative photoresist, appears to satisfy these requirements and, thus, has become one of our candidate materials for waveguide fabrication on plastic microchips. Although the SU-8 has been previously used for waveguide fabrication, its optical properties and more specifically the influence of processing conditions on resultant optical properties have not been thoroughly characterized. This work presents an evaluation of SU-8-based multimode waveguides on glass and plastic substrates. Optical constants of waveguides have been characterized by spectroscopic ellipsometric and prism coupling techniques. Additionally, using the latter method, evaluation of propagation losses of various structures with different thicknesses has been made. Ellipsometric and prism coupling measurements gave comparable refractive indices for variously cured SU-8 waveguide materials. Prism coupling analyses proved to be more useful for analysis of the many SU-8 waveguide structures fabricated in the thickness range of 5 to 75 mu m.

SU-8 Grating Assisted Intermodal Interference in Surface Plasmon Polariton Waveguide

Subwavelength Device Based on Surface Plasmon Polariton

UV-Written Long-Period Grating Based on Long-Range Surface Plasmon-Polariton Waveguide

Electromagnetically-Induced-Transparency Plasmonics: Quantum-Interference-Assisted Tunable Surface-Plasmon-Polariton Resonance and Excitation

Transmission of Long-Range Surface Plasmon-Polaritons Across Gap in Au Waveguide

Polymer/silica Hybrid Integration Waveguide Bragg Grating Based on Surface Plasmon Polaritons.

High Sensitivity Waveguide Micro-Displacement Sensor Based on Intermodal Interference

Direct Observation of Guided-Mode Interference in Polymer-Loaded Plasmonic Waveguide

Integrated SU-8 Prisms and Microgratings for Polarization-Selective Fiber-to-Silicon Waveguide Coupling

Analysis of waveguide structure for surface plasmon polariton interference

Excitation of Surface Plasmon Polariton Modes with Double-Layer Gratings of Graphene

Fabrication of long-range surface plasmon polaritons waveguide by wet chemical etching

Long-Range Surface Plasmon Polaritons Guided by a Thin Metal Stripe

Multilayer Waveguide Bragg Grating Based on Hybrid Surface Plasmon Polaritons

Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices

Surface Plasmon Polariton Coupling Induced Transmission of Subwavelength Metallic Grating with Waveguide Layer

Straight Long-Range Surface Plasmon Polariton Waveguide Sensor Operating at l 0 = 850 nm.

Design and Fabrication of SU-8 Arrayed-Waveguide Gratings Using Multimode Interference Couplers

Compact Spoof Surface Plasmon Polaritons Waveguide Drilled with L-shaped Grooves

Asymmetric Long-Range Surface Plasmon Polariton Waveguides for Sensing Applications

Controllable Patterning of Metallic Photonic Crystals for Waveguide–Plasmon Interaction