Micro-displacement Amplifier Based on Quasi-V-shaped Flexure Hinge

LIU Min,ZHANG Xian-min

DOI: https://doi.org/10.3788/ope.20172504.0999

2017-01-01

Abstract:A micro-displacement flexure amplifier was designed based on a high accuracy quasi-V-shaped flexure hinge to reduce its parasitic motion and to improve its dynamics performance.The performance of the quasi-V-shaped flexure hinge was compared with that of a common high accuracy right circular flexure hinge.In consideration of the central offset during the rotation of flexure hinge, the amplification ratios of secondary-lever micro-displacement mechanisms based on the quasi-V-shaped flexure hinge and the right circular flexure hinge were derived on the basis of the theories of elastic mechanics and material mechanics.The finite element model was established with ANSYS software to verify the theoretical derivation of amplification ratios of displacement.The amplification ratios of displacement, the parasitic motions and inherent frequencies of the two kinds of amplifiers mentioned above were compared.The finite element results show that the amplifier based on quasi-V-shaped flexure hinge has smaller parasitic motion but higher inherent frequency,and its first two-order inherent frequencies are 1.68 times and 1.41 times of those based on right circular flexure hinge.Finally, the amplification ratios of displacement and the parasitic motions for the two kinds of amplifiers were measured by a micro-vision measurement system.The experiment results show that the amplification ratios and relative parasitic motion ratios of amplifiers based on quasi-V-shaped and right circular flexure hinge are 4.387 and 4.529 as well as 0.3147 and 0.3342 respectively.It concludes that the parasitic motion is effectively reduced and the dynamics performance is improved if the quasi-V-shaped flexure hinge is used in the micro-displacement amplifiers.