Influence of pump-chamber height on bubble retention in piezoelectric micro-pump

CHEN Song,LIU Yong,KAN Jun-wu,ZHOU Jing-jing,YANG Zhi-gang,CHENG Guang-ming

DOI: https://doi.org/10.3788/OPE.20172503.0672

2017-01-01

Abstract:Since bubble retention may cause serious damage to output performance of piezoelectric micro-pump,properly reducing bubble retention can effectively improve stability and reliability of the piezoelectric pump system.Pump chamber is the main area for bubble retention and an important element determining the output performance,so change in the chamber height will have significant influence on bubble retention.In this paper,a mathematic model was established based on bubble pressure drop and output pressure to analyze the influence rules of chamber height on bubble retention,and then a bubble retention test was carried out verify the results.It indicates that when the chamber is 0.15 mm high,the piezoelectric pump has excellent output performance and ability to exclude bubbles,and after 120 0.02 mL bubbles entering the chamber,the pump still has a stable output pressure (8.1 kPa) and output flow (4.2 mL/min);when the chamber height is 0.05 mm and 0.20 mm,the piezoelectric pump is unable to work after a bubble enters,with a weak ability of excluding bubbles;when the chamber height is 0 mm and 0.10 mm,the piezoelectric pump is unable to work respectively after 47 and 70 bubbles enter.The results show that reasonable chamber height can effectively reduce bubble retention.