Conduction mechanism and impedance analysis of HfO x -based RRAM at different resistive states
Jiao Bai,Weiwei Xie,Weiqi Zhang,Zhipeng Yin,Shengsheng Wei,Dehao Qu,Yue Li,Fuwen Qin,Dayu Zhou,Dejun Wang
DOI: https://doi.org/10.1016/j.apsusc.2022.154084
IF: 6.7
2022-10-01
Applied Surface Science
Abstract:Conduction mechanism and impedance analysis of both the low resistance state (LRS) and high resistance state (HRS) are performed on TiN/HfO x /Pt resistive-switching memory devices at various temperatures. The dc conduction mechanism in LRS is dictated by Ohmic conduction, whereas by trap controlled space-charge-limited current conduction in HRS. The XPS analysis results on the surface of the HfO x film indicated the presence of oxygen deficiencies. The equivalent physical model under various resistance states is established by using ac impedance spectroscopy method, that is related to oxygen vacancies in the HfO x film. We further discussed the activation energy of dc and ac in the HRS and found the conduction occurs at the grain boundary. Through analysis of different resistance states of HfO x -based resistive switching memories, the conduction mechanism correlation between time and frequency domain is established.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films