60 GHz Air Cavity Antenna Array with Checkerboard Structure Using MEMS Micromachining Process

Le Chang,Yue Li,Zhijun Zhang,Zhenghe Feng,Rui Zhou

DOI: https://doi.org/10.1109/aps.2016.7695906

2016-01-01

Abstract:In this paper, we have proposed a 60-GHz air cavity antenna array with checkerboard structure based on the MEMS silicon bulk micromachining technology. A one-to-four power divider with a Si-to-air transition is designed to excite an air-filled cavity antenna array. By properly arranging the four sub arrays, the proposed array is with a checkerboard structure. An in-phase radiating aperture which is equivalent to a 4×5 magnetic current array is achieved, resulting in high gain performance.