Room Temperature No2 Gas Sensing of Au-Loaded Tungsten Oxide Nanowires/Porous Silicon Hybrid Structure

Deng-Feng Wang,Ji-Ran Liang,Chang-Qing Li,Wen-Jun Yan,Ming Hu
DOI: https://doi.org/10.1088/1674-1056/25/2/028102
2016-01-01
Chinese Physics B
Abstract:In this work, we report an enhanced nitrogen dioxide(NO 2 ) gas sensor based on tungsten oxide(WO 3 )nanowires/porous silicon(PS) decorated with gold(Au) nanoparticles. Au-loaded WO 3 nanowires with diameters of 10 nm–25 nm and lengths of 300 nm–500 nm are fabricated by the sputtering method on a porous silicon substrate. The high-resolution transmission electron microscopy(HRTEM) micrographs show that Au nanoparticles are uniformly distributed on the surfaces of WO 3 nanowires. The effect of the Au nanoparticles on the NO 2 -sensing performance of WO 3 nanowires/porous silicon is investigated over a low concentration range of 0.2 ppm–5 ppm of NO 2 at room temperature(25℃). It is found that the 10-? Au-loaded WO 3 nanowires/porous silicon-based sensor possesses the highest gas response characteristic. The underlying mechanism of the enhanced sensing properties of the Au-loaded WO 3 nanowires/porous silicon is also discussed.
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