Nanoscale Strain Mapping in SIMOX 3-D Sculpted Silicon Waveguides Using Tip-Enhanced Raman Spectroscopy

Huashun Wen,Yuefeng Ji,Bahram Jalali
DOI: https://doi.org/10.1109/JPHOT.2016.2612360
IF: 2.4
2016-01-01
IEEE Photonics Journal
Abstract:Strain in silicon plays a significant role in exploring electro-optical material, boosting transistor performance, tuning birefringence of optical silicon waveguides, and so on. In this paper, we measured, for the first time, the nanoscale strain in the SIMOX 3-D sculpted silicon waveguides using tip-enhanced Raman spectroscopy (TERS). A model, which relates the observed Raman peak shifts to the l...
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