Abstract:Micro-electro-mechanical system (MEMS) based mass spectrometry, MEMS mass spectrometry, emerges a new technique branch of miniature mass spectrometry. One of the main challenges hindering the development of MEMS mass spectrometry is the poor compatibility between the complex electrode structure of traditional ion optics and MEMS processes. This paper proposed a planar quadrupole mass filter utilizing a highly simplified stacked-layer structure and film electrodes, which is easy to fabricate with high precision by MEMS surface micromachining. The ion trajectory simulation model of the MEMS mass spectrometry chip involving all necessary ion optics was elaborated for investigating the preliminary performance of the planar quadrupole mass filter. By optimizing the crucial parameters such as the frequency of radio frequency voltage, the ratio of direct current voltage and radio frequency voltage, pre-pole length, main-pole length, and injection kinetic energy, the preliminary simulation result of planar quadrupole mass filter achieved a 1∼2Da peak width (at 50% of peak height) and 20∼80% ion transmission efficiency. Importantly, the planar quadrupole mass filter demonstrated a maximum working pressure of 0.1 Pa (using air as the buffer gas), 100 times higher than that of conventional quadrupole mass filters, while maintaining a 0.7∼1.8 Da peak width and ∼5% ion transmission efficiency. Additionally, to modify the theoretical formulas for the non-ideal quadrupolar field of planar quadrupole mass filter, a novel approach based on stability diagrams obtained by simulation was also introduced. The pretty good linearity (R 2 =1) between ion masses in the range of 10 to 100Da and the corresponding radio frequency voltages was verified through the simulated mass spectra. Notably, the proportional coefficient of ion mass and radio frequency voltage exhibited a minimal 4% deviation between the simulated value (4.7132 V 0P /Da) and the calculated value (4.9036 V 0P /Da) through the modified formula. In conclusion, the preliminary simulation results demonstrated that the planar quadrupole mass filter possessed moderate performance, high-pressure tolerance, and excellent theoretical consistency, which proved it a promising technology of MEMS mass spectrometry. It can find applications in the fields of gas detection, including the rapid response to hazardous gas emissions and in situ detection of dissolved gases in the deep sea.

The design of electrostatic quadrupole zoom lens for fixed multi-collector system at mass spectrometer

Electrostatic focusing system with demagnification applied in astronomical imaging detectors

Optimization Design Of Zoom Lens Systems

Simulation Study of a Planar Quadrupole Mass Filter for MEMS Mass Spectrometer

Simulation of a Quadrupole Mass Filter with Octupole Field

The High-Efficiency Calculation and Analysis of Different Quadrupole Fields Based on the Method of Fundamental Solution.

Development of a Newly Compact Double-Focusing Mass Spectrometer

A simple numerical simulation model can elucidate the key factors for designing a miniaturized ion trap mass spectrometer

A Novel Quadrupole Mass Filter Based On Rectangular Electrodes

Application and Development of Quadrupole Electrode System in Mass Spectrometry

Analysis and Simulation of Point-Focusing Property of a Quadrupole Lens Pair

Design and Development of a Scanning Magnet for High-Resolution Mass Spectrometry

Simulation of Sensitivity in Quadrupole Mass Spectrometer at Low Vacuum

Four-group Stabilized Zoom Lens Design of Two Focal-Length-variable Elements.

Quadrupole mass filters with octopole fields.

Design Method on the Stabilized Zoom Lens Design of Focal-Length-Variable Elements

Modeling and Simulation of Mass Spectrum of Rectangular Ion-Trap

Design and Optimization of Combined-Function Quadrupole-Sextupole Magnets

Modeling and Optimization of Dual-Cylinder Image Current Detector in Electrostatic Ion Beam Trap for Mass Spectrometry

Numerical Simulation for Mass Spectrometry Instrumentation

Design of High Ratio Middle Infrared Continuous Zoom Optical System