Abstract:Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with outstanding performances in term of mechanical Q factor and sensitivity to external perturbations. Broadening the functionalities of MEMS by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials and silicon-based compounds is challenging. An alternative approach is fabricating MEMS based on complex heterostructures made of materials inherently showing a variety of physical properties such as transition metal oxides. Here, we report on the integration of a high-Tc superconductor YBa2Cu3O7 (YBCO) with high Q factor micro-bridge resonator made of a single-crystal LaAlO3 (LAO) thin film. LAO resonators are tensile strained, with a stress of 345 MPa, show Q factor in the range of tens of thousands, and have low roughness. The topmost YBCO layer deposited by Pulse Laser Deposition shows a superconducting transition starting at 90 K with zero resistance below 78 K. This result opens new possibilities towards the development of advanced transducers, such as bolometers or magnetic field detectors, as well as basic science experiments in solid state physics, material science, and quantum opto-mechanics.

Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures

Frequency-tunable High-Q Superconducting Resonators Via Wireless Control of Nonlinear Kinetic Inductance

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Universal gapless Dirac cone and tunable topological states in (MnBi$_2$Te$_4$)$_m$(Bi$_2$Te$_3$)$_n$ heterostructures

Tunable superconducting resonators via on-chip control of local magnetic field

Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators

Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties

Tunable and High Quality Factor Fano and Toroidal Dipole Resonances in Terahertz Superconducting Metamaterials

A new type of HTc superconducting film comb-shape resonator for radio frequency superconducting quantum interference devices

Microwave loss and kinetic inductance of epitaxial TiN films

Long nanomechanical resonators with circular cross-section

Experimental Demonstrations of High-Q Superconducting Coplanar Waveguide Resonators

Tuning of Superconducting Niobium Nitride Terahertz Metamaterials

Development of TiN/AlN-based superconducting qubit components

Improving magnetic-field resilience of NbTiN planar resonators using a hard-mask fabrication technique

Monolithic Strong Coupling of Topological Surface Acoustic Wave Resonators on Lithium Niobate

Performance of Superconducting Resonators Suspended on SiN Membranes

A NEW TYPE OF HTc SUPERCONDUCTING THIN FILM COMB RESONATOR

Resilient Growth of a Highly Crystalline Topological Insulator-Superconductor Heterostructure Enabled by an Ex Situ Nitride Film

Integration of High-Tc Superconductors with High Q Factor Oxide Mechanical Resonators