Abstract:Quantum bits (qubits) with long coherence times are an important element for the implementation of medium- and large-scale quantum computers. In the case of superconducting planar qubits, understanding and improving qubits' quality can be achieved by studying superconducting planar resonators. In this Paper, we fabricate and characterize coplanar waveguide resonators made from aluminum thin films deposited on silicon substrates. We perform three different substrate treatments prior to aluminum deposition: One chemical treatment based on a hydrofluoric acid clean, one physical treatment consisting of a thermal annealing at 880 degree Celsius in high vacuum, one combined treatment comprising both the chemical and the physical treatments. We first characterize the fabricated samples through cross-sectional tunneling electron microscopy acquiring electron energy loss spectroscopy maps of the samples' cross sections. These measurements show that both the chemical and the physical treatments almost entirely remove native silicon oxide from the substrate surface and that their combination results in the cleanest interface. We then study the quality of the resonators by means of microwave measurements in the "quantum regime", i.e., at a temperature T~10 mK and at a mean microwave photon number $\langle n_{\textrm{ph}} \rangle \sim 1$. In this regime, we find that both surface treatments independently improve the resonator's intrinsic quality factor and that the highest quality factor is obtained for the combined treatment, $Q_{\textrm{i}} \sim 0.8$ million. Finally, we find that the TLS quality factor averaged over a time period of 3 h is $\sim 3$ million at $\langle n_{\textrm{ph}} \rangle \sim 10$, indicating that substrate surface engineering can potentially reduce the TLS loss below other losses such as quasiparticle and vortex loss.

Performance of Superconducting Resonators Suspended on SiN Membranes

Superconducting cavity-electromechanics on silicon-on-insulator

Substrate surface engineering for high-quality silicon/aluminum superconducting resonators

Surface Passivation of Niobium Superconducting Quantum Circuits Using Self-Assembled Monolayers

Demonstration of superconducting micromachined cavities

Cascaded On-Chip Phonon Shield for Membrane Microresonators.

Long-lived Microwave Electromechanical Systems Enabled by Cubic Silicon-Carbide Membrane Crystals

Superconducting quantum memory with a suspended coaxial resonator

Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications

Fabrication of Silicon Nitride Membrane Nanoelectromechanical Resonator

Superconducting Non-Reciprocity Based on Time-Modulated Coupled-Resonator Systems

Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices

Superconducting qubits on silicon substrates for quantum device integration

Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

Protecting superconducting qubits from phonon mediated decay

Experimentally verified, fast analytic and numerical design of superconducting resonators in flip-chip architectures

Experimental Demonstrations of High-Q Superconducting Coplanar Waveguide Resonators

Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

Improving the Time Stability of Superconducting Planar Resonators