Model Parameter Extraction of Lateral Propagating Surface Acoustic Waves with Coupling on SiO2/grating/LiNbO3structure
Benfeng Zhang,Tao Han,Xinyi Li,Yulin Huang,Tatsuya Omori,Ken-ya Hashimoto
DOI: https://doi.org/10.7567/jjap.57.07ld04
IF: 1.5
2018-01-01
Japanese Journal of Applied Physics
Abstract:This paper investigates how lateral propagation of Rayleigh and shear horizontal (SH) surface acoustic waves (SAWs) changes with rotation angle θ and SiO2 and electrode thicknesses, hSiO2 and hCu, respectively. The extended thin plate model is used for purpose. First, the extraction method is presented for determining parameters appearing in the extended thin plate model. Then, the model parameters are expressed in polynomials in terms of hSiO2, hCu, and θ. Finally, a piston mode structure without phase shifters is designed using the extracted parameters. The possible piston mode structures can be searched automatically by use of the polynomial expression. The resonance characteristics are analyzed by both the extended thin plate model and three-dimensional (3D) finite element method (FEM). Agreement between the results of both methods confirms validity and effectiveness of the parameter extraction process and the design technique.