Diamond Schottky Barrier Diode with Fluorine- and Oxygen-Termination

Chao Hu,Zhangcheng Liu,Jingwen Zhang,Wei Wang,Hong-Xing Wang
DOI: https://doi.org/10.1557/adv.2016.135
2016-01-01
MRS Advances
Abstract:Schottky properties of Mo on diamond with fluorine- and oxygen-termination had been investigated. Oxygen-termination was generated by aqua regia. Fluorine-termination was generated by CF 4 plasma treatment. Mo/Ni/Au was deposited on the diamond surface as Schottky electrode, whose barrier height was evaluated from current-voltage curve. After that, the X-ray photoelectron spectroscopy methods were applied to calculate the Schottky barrier height of Mo on different termination surface. The results indicated that the fluorine-termination and oxygen-termination show different schottky properties.
What problem does this paper attempt to address?