Control System Reforming of Vacuum Coating Equipment on Temperature

Jia-bin LIU,Xue-hao SHEN,Xiao-ling WANG
DOI: https://doi.org/10.3969/j.issn.1006-7167.2014.12.013
2014-01-01
Abstract:Vacuum experiment is an important experiment. But facing on the heavy task of experimental teaching and stressful teaching hours,the traditional vacuum equipment cannot meet the experiment teaching work because of various reasons. In the condition of the limited funds and the vacuum equipments that cannot scrapped,the equipments should carry out targeted transformation due to the actual needs of experimental teaching. The diffusion pump of DM-240 uses a cooling water system,but in the end of the experiment process,it needs manually determine whether to cool,then the equipment and the water system can be shutdown. Because the process needs long time,it affects the quality of experimental teaching. Therefore the diffusion pump cooling control system should be transformed into temperature automation control system. Through to monitor the temperature of diffusion pump,it can automatically shut off the cooling water system and unit equipment. It not only ensures the experimental teaching hours,but also avoids the damage of the machine due to mishandling.
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