Preparation of WO3 Films with Nanoporous Structure

MEI Yu-dong,CAI Jia-jia,LI Song,QIN Gao-wu
DOI: https://doi.org/10.3969/j.issn.1005-3026.2014.02.018
2014-01-01
Abstract:Thin films of WO 3 nanoporous structure grow n on tungsten substrates using the anode oxidation method w ere studied. The effects of anodic oxidation conditions such as the concentration of NH 4 F in the electrolyte,the applied voltage and the heat treatment schedule on the surface morphologies of the WO 3 film w ere investigated. The preparation conditions to form nanoporous WO 3 film w ith good microstructure w ere optimized. It w as found that the films prepared in electrolyte containing 0. 05 w t.% NH 4 F for 20 min w ith the applied voltage of 60 V at 20 ℃ exhibited the expected nanoporous morphology w ith self assembled nano multilayer mesh structure closely packed. In addition,after heat treated at 450 ℃ for 3 h w ith a heating rate of 5 ℃ / min,the amorphous films crystallized w ithout changing their as-obtained nanoporous structures.
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