Humidity Sensing Mechanism of Nanometer Barium Titanate Humidity Sensor Analyzed by Complex Impedance Method

万徽,王兢,宝晓鹏
DOI: https://doi.org/10.3969/j.issn.1000-9787.2003.09.028
2003-01-01
Abstract:Complex impendance methods are used to analyze the humidity sensing mechanism of nanometer barium titanate humidity sensors on silicon substrate.The characteristic curves of resistance,capacitance and complex impedance of the sensors versus relative humidity (RH) are measured at different frequencies.An equivalent circuit model associated with resistors and capacitors is built and some parameters of the circuit are deduced.Sensing mechanism of the sensor is discussed.In low RH range,the humidity sensing properties are determined mainly by the crystal grain resistance and the capacitance on the grain interfaces.In high RH range,the polarization and ionization of the absorbed water molecule make a main contribution to humidity sensing properties.
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