Improvement for the Resolution of Soft X - Ray Microscopic Contact Imaging

高鸿奕,陈建文,谢红兰,陆培祥,徐至展,蒋诗平,张新夷
DOI: https://doi.org/10.3321/j.issn:0253-3219.2001.07.013
2001-01-01
Abstract:Several factors effecting the resolution of soft X - ray microscopic imaging by contact process were discussed. These main factors included damages during recording, subsequent errors brought by equipment in magnifying and reading and Fresnel knife - edges diffraction etc. Some practical methods were suggested for improvement of the resolution.
What problem does this paper attempt to address?