Research on Principle and Experiments of Trace Explosive Particle Detection with MEMS

张彦,梅涛,孔德义,张成梅,付国强,胡圣军
DOI: https://doi.org/10.3969/j.issn.1671-4776.2003.03.007
2003-01-01
Abstract:A new micro cantilever explosive particle detector based on MEMS is presented in this paper, which utilizes the properties of explosive particles. The principle of the detector is described firstly: every explosive has different liquated and evaporation points, when explosive particles on the micro cantilever liquate and absorb heat from the cantilever, the cantilever will bend because of temperature change. At last, some exploratory researches such as structure design, theoretical calculate and technical projects are also introduced.
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