Multiple Crystal X - Ray Diffraction Analysis of Stress in HgCdTe Photovoltaic Detector

孙涛,王庆学,陈文桥,梁晋穗,陈兴国,胡晓宁,李言谨,何力
DOI: https://doi.org/10.3969/j.issn.1007-4252.2004.03.007
2004-01-01
Abstract:The low-temperature performance of HgCdTe photovoltaic detector is limited by the stress of wafer. In this paper, the stress of HgCdTe passivated by CdTe and ZnS was investigated byusing triple crystal x-ray diffraction and reciprocal space mapping, it is found that under the high sputtering power the wafer is bended due to induced stress, and the mosaic structure is observed. Thelow-stress film is achieved by low-power sputtering and thermal evaporation.
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