Hydrogen Sensors and Semiconductor Thin Films in This Field

郝俊杰,李龙土
DOI: https://doi.org/10.3321/j.issn:1001-9731.2004.01.003
2004-01-01
Abstract:With the coming use of hydrogen-driven vehicles, a highly sensitive and selective hydrogen sensor was required aiming at application like fire warning or leakage-control system. Classifications and principles of H_2 sensor were described in this paper. The mechanism of thin film hydrogen sensors was introduced thoroughly. After that the research and development of semiconductor thin film, including Ga_2O_3 new material used in hydrogen sensor were proposed.
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