Investigation on the Competitive Fracture Behavior in Nano-Multilayered Structures

Kai Huang,Licheng Guo,Yabin Yan,Takayuki Kitamura
DOI: https://doi.org/10.1016/j.ijsolstr.2016.04.029
IF: 3.667
2016-01-01
International Journal of Solids and Structures
Abstract:The competitive fracture behavior in nano-multilayered structures is investigated by a new analysis method combining the interaction energy integral method and the cohesive zone model. Different fracture patterns including crack initiation in the SiN layer and interface debonding at the SiN/Cu interface are investigated systematically, and the fracture pattern in a nano-multilayered specimen is well predicted. The cohesive zone parameters of the SiN/Cu interface are also obtained, which are very difficult to test directly. This study will provide reliable guidance for the fracture strength test and the design of nano-multilayered structures and hence be of great significance. (C) 2016 Elsevier Ltd. All rights reserved.
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