Towards Understanding The Detection Of Profile Asymmetry From Mueller Matrix Differential Decomposition

Xiuguo Chen,Hao Jiang,Chuanwei Zhang,Shiyuan Liu
DOI: https://doi.org/10.1063/1.4937558
IF: 2.877
2015-01-01
Journal of Applied Physics
Abstract:The Mueller matrix differential decomposition is applied to interpret Mueller matrices of asymmetric gratings and to understand the use of Mueller matrix ellipsometry (MME) in distinguishing the direction of profile asymmetry, as reported in our recent work [Chen et al,,]. Appl. Phys. 116, 194305 (2014)1, We show that both linear and circular birefringence-dichroism pairs can be extracted from the collected Mueller matrices, which provide a complete description of the sample polarization properties. We present both theoretical and experimental results, which demonstrate that the linear birefringence and dichroism, LB' and LD', along the 1-45' axes are the origin of the MME in distinguishing the direction of profile asymmetry. We also demonstrate that equal magnitude of profile asymmetry in opposite directions always yields LW and LD' of the same absolute deviation from zero and of opposite sign, when the plane of incidence is no longer perpendicular to grating lines. The sensitivity of LB' and LD' to both the magnitude and direction of profile asymmetry is useful in monitoring processes in which symmetric structures are desired. (C) 2015 AIP Publishing LLC
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