Displacement Measurement System for Inverters Using Computer Micro-Vision

Heng Wu,Xianmin Zhang,Jinqiang Gan,Hai Li,Peng Ge
DOI: https://doi.org/10.1016/j.optlaseng.2015.12.018
IF: 5.666
2016-01-01
Optics and Lasers in Engineering
Abstract:We propose a practical system for noncontact displacement measurement of inverters using computer micro-vision at the sub-micron scale. The measuring method of the proposed system is based on a fast template matching algorithm with an optical microscopy. A laser interferometer measurement (LIM) system is built up for comparison. Experimental results demonstrate that the proposed system can achieve the same performance as the LIM system but shows a higher operability and stability. The measuring accuracy is 0.283μm.
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