Additive Manufacturing of Thermoelectric Microdevices for Four‐Dimensional Thermometry
Heekwon Lee,Zhuoran Wang,Qing Rao,Sanghyeon Lee,Xiao Huan,Yu Liu,Jihyuk Yang,Mojun Chen,Dong‐Keun Ki,Ji Tae Kim
DOI: https://doi.org/10.1002/adma.202301704
IF: 29.4
2023-05-09
Advanced Materials
Abstract:Thermometry, the process of measuring temperature, is one of the most fundamental tasks not only for understanding the thermodynamics of basic physical, chemical, and biological processes but also for thermal management of microelectronics. However, it is a challenge to acquire microscale temperature fields in both space and time. Here, w e report on a three‐dimensionally (3D) printed micro‐thermoelectric device that enables direct four‐dimensional (3D Space + Time) thermometry at the microscale. The device is composed of freestanding thermocouple probe networks, fabricated by bi‐metal 3D printing with an outstanding spatial resolution of ∼ μm. W e show that the developed 4D thermometry can explore dynamics of Joule heating or evaporative cooling on microscale subjects of interest such as a microelectrode or a water meniscus. The utilization of 3D printing further opens up the possibility to freely realize a wide range of on‐chip, freestanding microsensors or microelectronic devices without the design restrictions by manufacturing processes. This article is protected by copyright. All rights reserved
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology