Multiasperity elastic adhesion contact analysis for rough surfaces of microsystem

miao shujing,guo zhiping,liu jiang
DOI: https://doi.org/10.16731/j.cnki.1671-3133.2016.04.030
2016-01-01
Abstract:The adhesion force that exists in Micro Electro Mechanical Systems(MEMS)is a major failure mode for microscale objections during manipulation. The multiasperity elastic adhesion contact model is presented by combing Maugius’ theory with Kim physical contact theory. In order to compute adhesion force of the model by fractal geometry,the adhesion contact radius of Kim theory is approximated. It is compared the adhesion force of new model with that of Morrow model. The result indicates that,rough surfaces of two asperities is the smaller physical contact distance and the greater adhesion force;when fractal dimension is increased,adhesion force of physical contact for asperity is obviously increased;when fractal roughness is decreased,in the number of asperities of Kim physical contact and adhesion force are greatly increased.
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