Abstract:This work demonstrates a universal strategy for robust growth of high‐quality transition metal dichalcogenide (TMD) vertical heterostructures and a novel design concept for the fabrication of high mobility and high responsivity photodetectors based on 2D TMD vertical heterostructures, which holds promise for the next‐generation photodetectors. Two dimension (2D) transition metal dichalcogenides (TMD) heterostructures have opened unparalleled prospects for next‐generation electronic and optoelectronic applications due to their atomic‐scale thickness and distinct physical properties. The chemical vapor deposition (CVD) method is the most feasible approach to prepare 2D TMD heterostructures. However, the synthesis of 2D vertical heterostructures faces competition between in‐plane and out‐of‐plane growth, which makes it difficult to precisely control the growth of vertical heterostructures. Here, a universal and controllable strategy is reported to grow various 2D TMD vertical heterostructures through an ammonium‐assisted CVD process. The ammonium‐assisted strategy shows excellent controllability and operational simplicity to prevent interlayer diffusion/alloying and thermal decomposition of the existed TMD templates. Ab initio simulations demonstrate that the reaction between NH4Cl and MoS2 leads to the formation of MoS3 clusters, promoting the nucleation and growth of 2D MoS2 on existed 2D WS2 layer, thereby leading to the growth of vertical heterostructure. The resulting 2D WSe2/WS2 vertical heterostructure photodetectors demonstrate an outstanding optoelectronic performance, which are comparable to the performances of photodetectors fabricated from mechanically exfoliated and stacked vertical heterostructures. The ammonium‐assisted strategy for robust growth of high‐quality vertical van der Waals heterostructures will facilitate fundamental physics investigations and device applications in electronics and optoelectronics.

Solution Processing for Lateral Transition-Metal Dichalcogenides Homojunction from Polymorphic Crystal.

Morphology Engineering in Monolayer MoS2‐WS2 Lateral Heterostructures

Sequential Edge-Epitaxy in 2D Lateral Heterostructures

Programmable transition metal dichalcogenide homojunctions controlled by nonvolatile ferroelectric domains

Defect-engineering of liquid-phase exfoliated 2D semiconductors: stepwise covalent growth of electronic lateral hetero-networks

Epitaxial Growth of Step-Like Cr2 S3 Lateral Homojunctions Towards Versatile Conduction Polarities and Enhanced Transistor Performances.

Towards the scalable synthesis of two-dimensional heterostructures and superlattices beyond exfoliation and restacking

Composition-Tunable Transition Metal Dichalcogenide Nanosheets via a Scalable, Solution-Processable Method

Controllable structure-engineered janus and alloy polymorphic monolayer transition metal dichalcogenides by plasma-assisted selenization process toward high-yield and wafer-scale production

Robust Growth of 2D Transition Metal Dichalcogenide Vertical Heterostructures via Ammonium‐Assisted CVD Strategy

Bridging Synthesis and Controllable Doping of Monolayer 4 In. Length Transition-Metal Dichalcogenides Single Crystals with High Electron Mobility

Recent advances on liquid intercalation and exfoliation of transition metal dichalcogenides: From fundamentals to applications

Conversion of Non-Van Der Waals Solids to 2D Transition-Metal Chalcogenides.

Very Large-Sized Transition Metal Dichalcogenides Monolayers from Fast Exfoliation by Manual Shaking

Intermediates of Forming Transition Metal Dichalcogenides Heterostructures Revealed by Machine Learning Simulations

Unraveling High-Yield Phase-Transition Dynamics in Transition Metal Dichalcogenides on Metallic Substrates.

Diverse Atomically Sharp Interfaces And Linear Dichroism Of 1t' Res2-Rese2 Lateral P-N Heterojunctions

Epitaxial Growth of Step‐Like Cr 2 S 3 Lateral Homojunctions Towards Versatile Conduction Polarities and Enhanced Transistor Performances

Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

Electrochemical molecular intercalation and exfoliation of solution-processable two-dimensional crystals

Robust synthesis of two-dimensional metal dichalcogenides and their alloys by active chalcogen monomer supply