Large-Scale Two-Dimensional Mos2 Photodetectors by Magnetron Sputtering

Z. P. Ling,R. Yang,J. W. Chai,S. J. Wang,W. S. Leong,Y. Tong,D. Lei,Q. Zhou,X. Gong,D. Z. Chi,K. -W. Ang
DOI: https://doi.org/10.1364/oe.23.013580
IF: 3.8
2015-01-01
Optics Express
Abstract:We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a wavelength of 850 nm, surpassing the performance of mechanically exfoliated based photodetectors.
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