Abstract:Optical displacement metrology is important in nanotechnology and used to identify positions and displacements of nanodevices. Although several methods have been proposed, a sensor with ultracompact size, angstrom-scale resolution, and large measurement range is still lacking. We propose an optical displacement sensor with wavelength modulation that can demonstrate subwavelength footprint and angstrom-level resolution with large measurement range in this study. The proposed sensor consists of two optical slot antennas. Surface plasmon polaritons (SPPs) are launched at antennas and interfere when a tightly focused broadband light source illuminates the sensor. Spectrum of output SPPs presents a dip, which depends on the position of focal spot of incident light and is used to extract displacement. A maximum resolution of 0.734 nm was obtained. Furthermore, we used interference fringe of two broadband beams as light source and the measurement range of the sensor is not limited by the size of the tightly focused light source while maintaining high resolution. The method utilizes a new mechanism of wavelength modulation to overcome the trade-off between the high resolution and large measurement range, and achieve a variety of potential applications for nanometrology in the future.

Nanoscale Displacement Sensing Based on the Interaction of a Gaussian Beam with Dielectric Nano-Dimer Antennas.

Nano-Displacement Measurement Based On Virtual Pinhole Confocal Method

Axial nano-displacement measurement with high resolution and wide range based on asymmetrical illumination.

Axial nanodisplacement measurement based on the double-helix point spread function generated using radially polarized beams with vortex phase modulation

Axial Nanodisplacement Measurement Based on Astigmatism Effect of Crossed Cylindrical Lenses.

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

An Axial Displacement Measurement Relying on the Double-Helix Light Beam

Nanometric Displacement Sensor with a Switchable Measuring Range Using a Cylindrical Vector Beam Excited Silicon Nanoantenna.

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

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Two-dimensional Displacement Sensors with Angstrom-Scale Resolution Based on Optical Slot Antenna Arrays

Differential internal multi-reflection method for nano-displacement measurement

Unidirectional Scattering Exploited Transverse Displacement Sensor with Tunable Measuring Range

Broadband Transverse Displacement Sensing of Silicon Hollow Nanodisk under Focused Radial Polarization Illumination in the Near-Infrared Region

An Ultra-Compact Angstrom-Scale Displacement Sensor with Large Measurement Range Based on Wavelength Modulation

Nanoscale Displacement Measurement in A Variable-Air-Gap Optical Waveguide

Displacement Detection Decoupling in Counter-Propagating Dual-Beams Optical Tweezers with Large-Sized Particle

A nanoelectromechanical position-sensitive detector with picometer resolution

Signal Process in a Novel System for Nano-Displacement Measurement Based on Optical Lever

Nanofiber based displacement sensor

A New Capacitive Long-Range Displacement Nanometer Sensor with Differential Sensing Structure Based on Time-Grating