Abstract:Aspheric optical components are an indispensable part of modern optics systems. With the development of aspheric optical elements fabrication technique, high-precision figure error test method of aspheric surfaces is a quite urgent issue now. We proposed a digital Moiré interferometer technique (DMIT) based on partial compensation principle for aspheric and freeform surface measurement. Different from traditional interferometer, DMIT consists of a real and a virtual interferometer. The virtual interferometer is simulated with Zemax software to perform phase-shifting and alignment. We can get the results by a series of calculation with the real interferogram and virtual interferograms generated by computer. DMIT requires a specific, reliable software system to ensure its normal work. Image acquisition and data processing are two important parts in this system. And it is also a challenge to realize the connection between the real and virtual interferometer. In this paper, we present a software system design for DMIT with friendly user interface and robust data processing features, enabling us to acquire the figure error of the measured asphere. We choose Visual C++ as the software development platform and control the ideal interferometer by using hybrid programming with Zemax. After image acquisition and data transmission, the system calls image processing algorithms written with Matlab to calculate the figure error of the measured asphere. We test the software system experimentally. In the experiment, we realize the measurement of an aspheric surface and prove the feasibility of the software system.

Virtual Interferometer Calibration Method of a Non-Null Interferometer for Freeform Surface Measurements.

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Non-null interferometric aspheric testing with partial null lens and reverse optimization

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Calibration of misalignment errors in the non-null interferometry based on reverse iteration optimization algorithm

Reverse Optimization Reconstruction Method in Non-Null Aspheric Interferometry

Freeform Surface Measurement with Non-Null Interferometry

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Retrace Error Correction for Non-Null Testing of Optical Aspheric Surface

Non-null Compensator Design Method in Digital Moiré Interferometry for Freeform Surface Measurement

Flexible interferometric null testing for concave free-form surfaces using a hybrid refractive and diffractive variable null.

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

Adaptive null interferometric test using spatial light modulator for free-form surfaces.

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Adaptive Interferometric Null Testing for Unknown Freeform Optics Metrology.

Measurement of steep aspheric surfaces using improved two-wavelength phase-shifting interferometer

Model Calibration by Multi-Null Constraint for an Optical Freeform Surface Adaptive Interferometer

Adaptive Optics Based Non-Null Interferometry for Optical Free Form Surfaces Test

Software System Design for the Non-Null Digital Moiré Interferometer