Abstract:In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects in patterned wafers, realized by bright-field microscopy, is one of the critical factors for ensuring the final performance and yields of chips. With the critical dimensions of IC nanostructures continuing to shrink, directly imaging or classifying deep-subwavelength defects by bright-field microscopy is challenging due to the well-known diffraction barrier, the weak scattering effect, and the faint correlation between the scattering cross-section and the defect morphology. Herein, we propose an optical far-field inspection method based on the form-birefringence scattering imaging of the defective nanostructure, which can identify and classify various defects without requiring optical super-resolution. The technique is built upon the principle of breaking the optical form birefringence of the original periodic nanostructures by the defect perturbation under the anisotropic illumination modes, such as the orthogonally polarized plane waves, then combined with the high-order difference of far-field images. We validated the feasibility and effectiveness of the proposed method in detecting deep subwavelength defects through rigid vector imaging modeling and optical detection experiments of various defective nanostructures based on polarization microscopy. On this basis, an intelligent classification algorithm for typical patterned defects based on a dual-channel AlexNet neural network has been proposed, stabilizing the classification accuracy of λ/16-sized defects with highly similar features at more than 90%. The strong classification capability of the two-channel network on typical patterned defects can be attributed to the high-order difference image and its transverse gradient being used as the network's input, which highlights the polarization modulation difference between different patterned defects more significantly than conventional bright-field microscopy results. This work will provide a new but easy-to-operate method for detecting and classifying deep-subwavelength defects in patterned wafers or photomasks, which thus endows current online inspection equipment with more missions in advanced IC manufacturing.

Detection of Defects on the Surface of a Semiconductor by Terahertz Surface Plasmon Polaritons.

Nondestructive Evaluation of Special Defects Based on Ultrasound Metasurface

Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

Design and Testing of a Micro Thermal Sensor for Non-Contact Surface Defect Detection.

Quantitative Detection of Surface Defect Using Laser-Generated Rayleigh Wave with Broadband Local Wavenumber Estimation

Non-destructive Plasma Frequency Measurement for a Semiconductor Thin Film Using Broadband Surface Plasmon Polaritons

Defects Detection Method Based on Programmable Spoof Surface Plasmon Polaritons in Non-Metallic Composites

Terahertz Surface Plasmon On Semiconductor And Thin Dielectric Surfaces

Terahertz nanospectroscopy of plasmon polaritons for the evaluation of doping in quantum devices

Spectrum Analysis of Bio-Chemical Thin Films on the Surface of A Semiconductor by Terahertz Surface Plasmon Polaritons

Detection of Small Defects in Composite Insulators Using Terahertz Technique and Deconvolution Method

Study on Detection of Insulator Defects in Time Domain Terahertz Wave

Coplanar Excitation of Terahertz Spoof Surface Plasmon and High-Q Sensing

The Effect of Infrared Plasmon on the Performance of Si-based THz Detectors

Width and Depth Gauging of Rectangular Subsurface Defects Based on All-Optical Laser-Ultrasonic Technology

Sensitive Detection of Chlorpyrifos Pesti Cide Using Terahertz Metasurface

Projective Quasiparticle Interference of a Single Scatterer to Analyze the Electronic Band Structure of ZrSiS

Rapid Sensing of Hidden Objects and Defects using a Single-Pixel Diffractive Terahertz Processor

Method of Defects Detection in Non-Metallic Composites Based on Liquid Flow Controlled Spoof Surface Plasmon Polaritons

Surface plasmon-polariton resonance at diffraction of THz radiation on semiconductor gratings

Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence