Size Effects on the Deformation and Damage of Cu-Based Metallic Nanolayered Micro-Pillars

Sun Jun,Zhang Jinyu,Wu Kai,Liu Gang
DOI: https://doi.org/10.11900/0412.1961.2016.00315
IF: 1.797
2016-01-01
ACTA METALLURGICA SINICA
Abstract:The nanostructured metallic multilayers (NMMs) are widely used as essential components of high performance microelectronics and interconnect structures. The deformation and damage of NMMs is the essential factor leading to the structural failure of these systems. In this paper, based on these experimental results achieved by the authors, as well as the state-of-the-art and progress at home and abroad in the plastic deformation behavior of micropillars of Cu-based NNIMs, the correlation of microstructure-size constraint-mechanical performance in the Cu-based nanolayered micropillars is illustrated. The universality of their deformation modes and internal damage mechanisms are revealed, and the work hardening/softening behaviors of two types of nanolaminates, including crystalline/crystalline and crystalline/amorphous NMMs, are summarized. Finally, a brief prospect on the studies of NMMs in future is suggested.
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