Abstract:Semiconducting 2D materials, such as transition metal dichalcogenides (TMDs), are emerging in nanomechanics, optoelectronics, and thermal transport. In each of these fields, perfect control over 2D material properties including strain, doping, and heating is necessary, especially on the nanoscale. Here, we study clean devices consisting of membranes of single-layer MoS2 suspended on pillar arrays. Using Raman and photoluminescence spectroscopy, we have been able to extract, separate and simulate the different contributions on the nanoscale and to correlate these to the pillar array design. This control has been used to design a periodic MoS2 mechanical membrane with a high reproducibility and to perform optomechanical measurements on arrays of similar resonators with a high-quality factor of 600 at ambient temperature, hence opening the way to multi-resonator applications with 2D materials. At the same time, this study constitutes a reference for the future development of well-controlled optical emissions within 2D materials on periodic arrays with reproducible behavior. We measured a strong reduction of the MoS2 band-gap induced by the strain generated from the pillars. A transition from direct to indirect band gap was observed in isolated tent structures made of MoS2 and pinched by a pillar. In fully suspended devices, simulations were performed allowing both the extraction of the thermal conductance and doping of the layer. Using the correlation between the influences of strain and doping on the MoS2 Raman spectrum, we have developed a simple, elegant method to extract the local strain in suspended and non-suspended parts of a membrane. This opens the way to experimenting with tunable coupling between light emission and vibration.

Monolayer MoS$_2$ Strained to 1.3\% with a Microelectromechanical System

Synthesis of built-in highly strained monolayer MoS2 using liquid precursor chemical vapor deposition

Strain Engineering 2D MoS$_{2}$ with Thin Film Stress Capping Layers

Improving the Strain Control Performance of MoS2 Monolayer to Develop Flexible Electronics

Direct X-Ray Measurements of Strain in Monolayer MoS$_{2}$ from Capping Layers and Geometrical Features

Strain-Enhanced Mobility of Monolayer MoS2

Biaxial Strain Transfer in Monolayer MoS2 and WSe2 Transistor Structures

Electronic transport modulation on few-layers suspended MoS$_2$ under strain

Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition

Monitoring Local Strain Vector in Atomic-Layered MoSe2 by Second-Harmonic Generation

Strain relaxation in monolayer MoS2 over flexible substrate

Control of biaxial strain in single-layer Molybdenite using local thermal expansion of the substrate

Fracturing of polycrystalline MoS$_2$ nanofilms

Piezoresistivity and Strain-induced Band Gap Tuning in Atomically Thin MoS2

Size-dependent strain-engineered nanostructures in MoS 2 monolayer investigated by atomic force microscopy

Improved Strain Transfer Efficiency in Large-Area Two-Dimensional MoS 2 Obtained by Gold-Assisted Exfoliation

Reduction in Thermal Conductivity of Monolayer MoS2 by Large Mechanical Strains for Efficient Thermal Management

Growth-Induced Strain in Chemical Vapor Deposited Monolayer MoS2: Experimental and Theoretical Investigation

Intrinsic properties of suspended MoS2 on SiO2/Si pillar arrays for nanomechanics and optics

Optical detection of strain and doping inhomogenieties in single layer MoS2

Manipulation of mechanical properties of monolayer molybdenum disulfide: Kirigami and hetero-structure based approach