Research on the control strategy of SEM based micro/nano tele-operation system

Zhou Jie,Rong Weibin,Xu Jinpeng,Sun Lining
DOI: https://doi.org/10.19650/j.cnki.cjsi.2014.11.006
2014-01-01
Abstract:In order to improve the tele-presence and stability of a scanning electron microscopy (SEM) based micro/nano tele-operation system, a sliding mode based impedance control scheme was proposed. Such a scheme features that impedance con-trol strategy was applied to master to fulfill compliant control and sliding mode based impedance control strategy was adopted to slave to solve the parameter uncertainty problem. Tracking differentiator technology was integrated to the master/slave control strategy to obtain the derivative control signal of the micro/nano teleoperation system. Under the circumstance of low band and large gain of force feedback (105), the stability condition of micro/nano teleoperation system was derived from Liewellyn criterion. The good robustness and accurate force tele-presence of the proposed sliding mode control approach were verified by simulation and experimental results. The maximum displacement error is less than 0.5μm during the location tracking process. The operator can precisely perceive 1μN contact force from the slave.
What problem does this paper attempt to address?