Layer Thinning of MoS2 Flakes by Thermal Annealing in Air

Qiyuan Wang,Youwei Zhang,Chunxiao Cong,Laigui Hu,Pengfei Tian,Ran Liu,Zhi-Jun Qiu
DOI: https://doi.org/10.1109/asicon.2017.8252542
2017-01-01
Abstract:We successfully thinned multilayer MoS2 flakes to monolayer by a simple and low-cost fabrication using thermal annealing in air. Optical microscopy, Raman microscopy and atomic force spectroscopy were used to characterize the process of thermal thinning Our results demonstrate a satisfactory uniformity of annealed monolayer MoS2. This process might show advantages in fabrication of nano-electronic devices based on thermally thinned MoS2.
What problem does this paper attempt to address?