Wireless micromachined ceramic pressure sensor for high-temperature applications
Michael A. Fonseca,Jennifer M. English,Martin von Arx,Mark G. Allen,M.A. Fonseca,J.M. English,M. von Arx,M.G. Allen
DOI: https://doi.org/10.1109/jmems.2002.800939
IF: 2.829
2002-08-01
Journal of Microelectromechanical Systems
Abstract:In high-temperature applications, such as pressure sensing in turbine engines and compressors, high-temperature materials and data retrieval methods are required. The microelectronics packaging infrastructure provides high-temperature ceramic materials, fabrication tools, and well-developed processing techniques that have the potential for applicability in high-temperature sensing. Based on this infrastructure, a completely passive ceramic pressure sensor that uses a wireless telemetry scheme has been developed. The passive nature of the telemetry removes the need for electronics, power supplies, or contacts to withstand the high-temperature environment. The sensor contains a passive LC resonator comprised of a movable diaphragm capacitor and a fixed inductor, thereby causing the sensor resonant frequency to be pressure-dependent. Data is retrieved with an external loop antenna. The sensor has been fabricated and characterized and was compared with an electromechanical model. It was operated up to 400°C in a pressure range from 0 to 7 Bar. The average sensitivity and accuracy of three typical sensors are: ${-}\hbox{141}~\hbox{kHz Bar}^{-1}$ and 24 mbar, respectively. $\hfill{\hbox{[662]}}$
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied