Radio Frequency Resonator-Based Flexible Wireless Pressure Sensor with MWCNT-PDMS Bilayer Microstructure
Baochun Xu,Mingyue Li,Min Li,Haoyu Fang,Yu Wang,Xun Sun,Qiuquan Guo,Zhuopeng Wang,Yijian Liu,Da Chen
DOI: https://doi.org/10.3390/mi13030404
IF: 3.4
2022-03-01
Micromachines
Abstract:Flexible pressure sensors have been widely applied in wearable devices, e-skin, and the new generation of robots. However, most of the current sensors use connecting wires for energy supply and signal transmission, which presents an obstacle for application scenarios requiring long endurance and large movement, especially. Flexible sensors combined with wireless technology is a promising research field for realizing efficient state sensing in an active state. Here, we designed and fabricated a soft wireless passive pressure sensor, with a fully flexible Ecoflex substrate and a multi-walled carbon nanotube/polydimethylsiloxane (MWCNT/PDMS) bilayer pyramid dielectric structure. Based on the principle of the radio-frequency resonator, the device achieved pressure sensing with a changeable capacitance. Subsequently, the effect of the pyramid density was simulated by the finite element method to improve the sensitivity. With one-step embossing and spin-coating methods, the fabricated sensor had an optimized sensitivity of 14.25 MHz/kPa in the low-pressure range. The sensor exhibited the potential for application in limb bending monitoring, thus demonstrating its value for long-term wireless clinical monitoring. Moreover, the radio frequency coupling field can be affected by approaching objects, which provides a possible route for realizing non-contact sensing in applications such as pre-collision warning.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied