A Protected Tungsten-Rhenium Thin Film Thermocouples Sensor

Zhongkai Zhang,Bian Tian,Qiuyue Yu,Qijing Lin,Na Zhao,Weixuan Jing,Zhuangde Jiang
DOI: https://doi.org/10.1109/nems.2017.8017138
2017-01-01
Abstract:A tungsten-rhenium thin film thermocouples is designed and fabricated, and the characteristics of thin film thermocouples in different temperatures are investigated via numerical analysis and analog simulation. Protective film was presented to prevent from the oxidation and evaporation of tungsten-rhenium TFTCs at high temperature. The experiment shows TFTCs sensor with protective film have an acceptable linearity up to 1370K with a suitable voltage output and can work for half an hour at 1370K, however the TFTCs without protective films break after high temperature constant at 900K.
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