Abstract:In the present study, a new turbomolecular pump (TMP) performance prediction algorithm is proposed according to the variable surface combined blade row (VSCBR) geometric model. The simulation calculation program is designed to perform structural optimization and flow field analysis. Research on the pumping performance of the traditional straight blade row (TSBR) indicates that when the blade velocity ratio is greater than 1, the increase in the pumping speed and compression ratio of the TMP gradually tends to stabilize. Response surface methodology is used to optimize the structural parameters of the first four stages of the combined blade row. The optimized VSCBR increases the pumping speed by 18.2% compared to that of the TSBR. The flow field analysis based on the optimized VSCBR shows that gas molecules reaching the rear blades are likely to approach the outlet, and the proportion of gas molecules in this region exceeds 50%. Therefore, the blades we designed should be conducive to additional gas molecules reaching the outlet.

What problem does this paper attempt to address?

The paper attempts to address the issue of improving the pumping performance of Turbomolecular Pumps (TMP). Specifically, the paper proposes a new performance prediction algorithm for TMPs, based on a Variable Surface Combined Blade Row (VSCBR) geometric model, designs a simulation calculation program, and conducts structural optimization and flow field analysis. ### Main Issues: 1. **Limitations of Traditional Straight Blade Row (TSBR)**: - The traditional TSBR structure cannot match the high speed of the turbine rotor at high rotational speeds, resulting in limited improvement in pumping performance. - Traditional modeling methods are mainly based on single-stage or two-stage blade row models, which cannot accurately reflect the gas molecule transmission process in multi-stage blade rows. 2. **Need to Improve Pumping Performance**: - With the development of magnetic suspension bearings and high-speed motor technology, the rotational speed of turbine rotors has increased from several thousand revolutions per minute to tens of thousands of revolutions per minute, but the current trend of increasing pumping performance is not obvious. - New VSCBR structures and modeling methods need to be proposed to overcome the limitations of increasing pumping speed. ### Solutions: 1. **New VSCBR Structure**: - A new VSCBR structure is proposed to adapt to the high-speed turbine rotor. - By introducing parameters such as blade root angle, blade tip angle, blade root thickness, and blade tip thickness, the accuracy of the model and the precision of the simulation calculations are improved. 2. **Performance Prediction Algorithm**: - A new multi-stage combined blade row performance prediction algorithm is established, based on the flight time of gas molecules as a criterion. - The Monte Carlo method (specifically the Test Particle Monte Carlo, TPMC method) is used for simulation calculations to track the motion trajectories of gas molecules. 3. **Structural Optimization and Flow Field Analysis**: - The Response Surface Methodology (RSM) is used to optimize the structural parameters of the first 4 stages of the combined blade row. - Flow field analysis is conducted to verify the impact of the optimized VSCBR structure on the motion of gas molecules. ### Experimental Verification: - The feasibility and accuracy of the newly proposed performance prediction algorithm and geometric model are verified by comparing experimental test results with simulation calculation results. - Experimental results show that the optimized VSCBR structure improves the pumping speed by 18.2% compared to the traditional TSBR structure. ### Conclusion: - The new VSCBR structure and performance prediction algorithm can significantly improve the pumping performance of turbomolecular pumps, especially under high-speed conditions. - Structural optimization and flow field analysis further verify the effectiveness of the new method.

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