Topologically Optimized Nano-Positioning Stage Integrating with A Capacitive Comb Sensor

Tao Chen,Yaqiong Wang,Huicong Liu,Zhan Yang,Pengbo Wang,Lining Sun
DOI: https://doi.org/10.3390/s17020257
IF: 3.9
2017-01-01
Sensors
Abstract:Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.
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