Effects of the negative bias voltages and post-annealing process on the crystallization and martensite formation of Ti-Zr-Hf-Co-Ni-Cu high-entropy thin film
Ruochen Zhang,Xuexi Zhang,Mingfang Qian,He Liu,Pengyan Mao,Shaohu Tao,Cean Guo
DOI: https://doi.org/10.1016/j.mtcomm.2024.108733
IF: 3.8
2024-04-01
Materials Today Communications
Abstract:In this study, the crystallization and martensite formation of Ti-Zr-Hf-Co-Ni-Cu high-entropy shape memory thin films deposited at negative bias voltages 0 V and −50 V by magnetron sputtering during a short-time annealing process are primarily investigated. Although the nanocrystalline/amorphous matrix structure is discovered in both Ti-Zr-Hf-Co-Ni-Cu thin films, the application of negative bias voltage favors the crystallization in the sputtering process due to the increased kinetic energy of impinging ions. After annealing at 1173 K for only 5 min, the further crystallization process occurs in both thin films, while the crystallization is incomplete due to the large atomic size difference, hysteresis diffusion and lattice distortion effect of the high-entropy system. However, the crystallinity and crystalline size are much larger for the annealed Ti-Zr-Hf-Co-Ni-Cu thin film deposited at negative bias voltage −50 V because the abundant nucleation sites offered by the large amounts of nanocrystalline in the as-deposited thin film accelerate the crystallization process greatly. At the same time, the grains with widths ∼ 200 nm, which are poor in Co and Ti elements but rich in Cu, Zr, and Hf elements, are formed. Furthermore, the B19' martensite formation only occurs in the annealed Ti-Zr-Hf-Co-Ni-Cu thin film deposited at negative bias voltage −50 V and the martensitic twin widths are only ∼ 1 nm, implying a possible combination of high strength and ductility. In comparison, the martensitic transformation is restrained in the annealed Ti-Zr-Hf-Co-Ni-Cu thin film deposited at negative bias voltage 0 V due to the extremely fine nanocrystalline with diameters < 5 nm.
materials science, multidisciplinary