Abstract:In this paper, we introduce a low-cost, expansible, and compatible measurement and control system for atomic force microscopes (AFM) based on a quartz tuning fork (QTF) self-sensing probe and frequency modulation, which is mainly composed of an embedded control system and a probe system. The embedded control system is based on a dual-core OMAPL138 microprocessor (DSP + ARM) equipped with 16 channels of a 16-bit high-precision general analog-to-digital converter (ADC) and a 16-bit high-precision general digital-to-analog converter (DAC), six channels of an analog-to-digital converter with a second-order anti-aliasing filter, four channels of a direct digital frequency synthesizer (DDS), a digital input and output (DIO) interface, and other peripherals. The uniqueness of the system hardware lies in the design of a high-precision and low-noise digital-analog hybrid lock-in amplifier (LIA), which is used to detect and track the frequency and phase of the QTF probe response signal. In terms of the system software, a software difference frequency detection method based on a digital signal processor (DSP) is implemented to detect the frequency change caused by the force gradient between the tip and the sample, and the relative error of frequency measurement is less than 3%. For the probe system, a self-sensing probe controller, including an automatic gain control (AGC) self-excitation circuit, is designed for a homemade balanced QTF self-sensing probe with a high quality factor (Q value) in an atmospheric environment. We measured the quality factor (Q value) of the balanced QTF self-sensing probes with different lengths of tungsten tips and successfully realized AFM topography imaging with a tungsten-tip QTF probe 3 mm in length. The results show that the QTF-based self-sensing probe and the developed AFM measurement and control system can obtain high quality surface topography scanning images in an atmospheric environment.

Optimizing the Quality Factor of Quartz Tuning Fork Force Sensor for Atomic Force Microscopy: Impact of Additional Mass and Mass Rebalance

High Quality-Factor Quartz Tuning Fork Glass Probe Used In Tapping Mode Atomic Force Microscopy For Surface Profile Measurement

Effects of naloxone on the cardiovascular responses to muscular contraction in decerebrate cats

A comparsion of force sensors for atomic force microscopy based on quartz tuning forks and length extensional resonators

Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy

Calibration of the oscillation amplitude of quartz tuning fork-based force sensors with astigmatic displacement microscopy

Improved Sensitivity for Subsurface Imaging by Contact Resonance Atomic Force Microscopy Using Fano Peaks

Experimental analysis of tip vibrations at higher eigenmodes of QPlus sensors for atomic force microscopy

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Measurement and Control System for Atomic Force Microscope Based on Quartz Tuning Fork Self-Induction Probe

Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy.

Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes

Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

Eigenmodes of a quartz tuning fork and their application to photo-induced force microscopy

Quantitative Formulation of Frequency-Dependent Average Force in AM-AFM

Integrated tuning fork nanocavity optomechanical transducers with high $f_{M}Q_{M}$ product and stress-engineered frequency tuning

Simultaneous detection of vertical and lateral forces by bimodal AFM utilizing a quartz tuning fork sensor with a long tip

Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy

Compact quartz tuning fork-atomic force microscope with a low thermal drift at room temperature

New fabrication technique for highly sensitive qPlus sensor with well-defined spring constant

Control of quality factor of atomic force microscopy cantilever by cavity optomechanical effect