Abstract:Due to the MIT (Metal-to-Insulator Transition) phase transition characteristics, vanadium oxide can be used as thermal, optical and voltage tuning metamaterials. In our works, VO 2 film was grown on silicon<;100= substrate with pulsed laser deposition, and its optical constants, below and above the phase transition temperature Tc_(68°C), were measured by spectroscopic ellipsometry. The dielectric constants of VO 2 in wavelength range from 8m to 14m were fitted by drude-lorentz model. Using the fitted dielectric constants of VO 2 , two kinds of mid-infrared absorbers composed of sandwich structures with a square patch FSS (Frequency Selective Surface) on the top were proposed for thermal tuning absorption study. The first structure depicted in Figure 1(a) is a hybrid VO 2 -Al 2 O 3 -Al metamaterial absorber. When the applied temperature is above Tc, VO 2 shows metallic characteristics, and the VO 2 -Al 2 O 3 -Al absorber has typical magnetic resonance peaks between 8m and 14 m. When the temperature is below Tc, VO 2 shows insulator characteristics and the VO 2 -Al 2 O 3 -Al absorber has low absorptivity in the mid-infrared bands. The other structure depicted in Figure 1(b) is a hybrid TiN-VO 2 -Al absorber which has an opposite performance with temperature comparing to the first one. It is a strong absorption structure below Tc, but becomes highly reflective structure above Tc. In order to better understand the absorption mechanism, the equivalent circuit model of the proposed structures were employed to discuss the relationship between the circuit parameters and the structure parameters. According to the law of Kirchhoff, the emissivity equals to the absorption when a material is at the condition of thermal equilibrium. Thermal tuning of infrared smart absorber is of much research and application value, such as infrared invisible watermark and discoloration camouflage.

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