A novel green waterless and oilless chemical mechanical polishing for soft-brittle, temperature-sensitive and deliquescent potassium dihydrogen phosphate
Yubiao Li,Zhenyu Zhang,Jianjun Yang,Zheng Ren,Shuming Zhao
DOI: https://doi.org/10.1016/j.surfin.2023.103117
IF: 6.2
2023-06-25
Surfaces and Interfaces
Abstract:Potassium dihydrogen phosphate (KDP) has the nature of softness, brittleness, temperature sensitivity and deliquescence, becoming a kind of extremely difficult-to-machine material. However, nonlinear and high-power laser devices require surface roughness of KDP less than 1.5 nm, which raises a challenge for the ultra-precision machining industry. To overcome this challenge, a novel green waterless and oilless chemical mechanical polishing (CMP) was developed, incorporating ethylene glycol, tartaric acid, triethanolamine , silica and ceria. After CMP, surface roughness Sa of KDP is 0.703 nm with a measurement area of 100 × 100 μm 2 . Up to now, to the best of our knowledge, it is the lowest surface roughness with such a big area. Material removal rate during CMP is 1.77 μm/min. X-ray photoelectron spectroscopy and infrared Fourier transformation reveal that chelates are formed on the surface of KDP, due to the adsorption of tartaric acid. Density functional theory simulations elucidate that the chelates are generated by the O − P bonds between tartaric aid and KDP. These results propose a novel green waterless and oilless CMP for soft-brittle, temperature sensitive and deliquescent KDP, which has potential applications for manufacturing nonlinear and high-power laser devices.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films