Studies of C-60 Films Deposited Using Ionized Cluster Beam Deposition Technique
Ren Zhong-Min,Du Yuan-Cheng,Ying Zhi-Feng,Xiong Xia-Xing,He Mao-Qi,Li Yu-Fen,Li Fu-Ming
DOI: https://doi.org/10.1557/proc-349-191
1994-01-01
MRS Proceedings
Abstract:Films (with thicknesses about thousands Å) of a new form of carbon allotrope, C60 also known as Fullerenes, are deposited on Si(111) substrates using ionized cluster beam deposition (ICBD) technique at low (65V) accelerating voltage Vs X-ray 0-20 diffraction (XRD) have been used to investigate the structural properties of C60 films, indicating hexagonal close-packed structure with strong (002) XRD assignment together with weak (100), (112) and(004) assignments. Raman spectra, X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) are carried out to make detailed studies of the electronic properties of the films and to illustrate differences between CO films and amorphous carbon films which are deposited by ICBD at high accelerating voltage Vs>400V. C60 soccer-balls are found to be broken into fragments as accelerating field overtakes about 400V, indicated by the results of XPS, Raman spectra, XRD, and UV/visible absorption spectra.