Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

yong zhang,wen wang,haitao ren,wenjia han,fangshu liu,jiangang yu,shixiang peng,kaigui zhu
DOI: https://doi.org/10.1016/j.nimb.2013.04.026
2013-01-01
Abstract:W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.
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