The Current Status of Development and Applications of Wave-Heated Discharge Plasma Sources

Ming Lu Cao,Jia Cheng,Chuan Kun Han,Lin Hong Ji
DOI: https://doi.org/10.4028/www.scientific.net/amr.1006-1007.193
2014-01-01
Advanced Materials Research
Abstract:Wave-heated discharges are well known as high-efficiency methods to generate high-density plasma at low pressures. In this paper, three types of plasma sources based on different wave-heated discharge principles are introduced systematically. Electron cyclotron resonance plasma, helicon wave plasma, and surface wave plasma systems are promising to be the next generation of plasma sources to meet increasingly strict requirements in microelectronics industry due to their remarkable advantages over conventional plasma sources.
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