Surface Spot Defects Inspection of Multi-Crystalline Silicon Wafers Based on HALCON

Xiao Song Wu,Rui Miao,Yu Dong Si,Cheok Man Lou,Duan Xia Xu,Xue Ning Chu
DOI: https://doi.org/10.4028/www.scientific.net/amr.1081.241
2014-01-01
Advanced Materials Research
Abstract:As a common kind of surface defects on multi-crystalline silicon solar cells (about 65% of total defects). Based on HALCON image processing library, an automatic silicon wafer surface spot defects detection and classification system has been developed: captured color images via CCD image sensor, located wafers and spots, extracted the spot features, computed and separated the qualified regions from the unqualified ones by SVM classifier. The experimental result showed a high accuracy of 95.7% and fast image analyzing and classifying process (less than 600ms).
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